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Saturday, July 25, 2020 | History

6 edition of Ion Implantation Science and Technology found in the catalog.

Ion Implantation Science and Technology

by James F. Ziegler

  • 118 Want to read
  • 37 Currently reading

Published by Academic Press Inc.,U.S. .
Written in English


The Physical Object
Number of Pages635
ID Numbers
Open LibraryOL7329525M
ISBN 100127806202
ISBN 109780127806204


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Ion Implantation Science and Technology by James F. Ziegler Download PDF EPUB FB2

Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation.

The book is divided into two parts. Part 1 discusses topics such as the history of the ion implantation; the different types and purposes of ion implanters; the penetration of energetic. Ion Implantation Science and Technology: Second Edition, just like the first edition, serves as both an introduction and tutorial to the science, techniques, and machines involved in the subject.

The book is divided into two parts - Part 1: Ion Implantation Science and Part 2: Ion Implantation Edition: 2. Ion Implantation Science and Technology: Second Edition, just like the first edition, serves as both an introduction and tutorial to the science, techniques, and machines involved in the subject.

The book is divided into two parts - Part 1: Ion Implantation Science and Part 2:. This use of ion implantation is being adopted by industry. Another important application is the fundamental study of the physical properties of materials. The First Conference on Ion Implantation in Semiconductors was held at Thousand Oaks, California in The second conference in this series was held at Garmish-Partenkirchen, Germany, in Format: Paperback.

Ion Implantation: Science and Technology Hardcover – by J. (ed) Ziegler (Author) out of 5 stars 1 rating. See all formats and editions Hide other formats and editions. Price New from Used from Hardcover, "Please retry" Reviews: 1.

@article{osti_, title = {Ion implantation: Science and technology}, author = {Ziegler, J F}, abstractNote = {This book is a tutorial presentation of the science, techniques, and machines of ion implantation.

The first section of this book concerns the science of ion implantation. It covers the historical development of the field, and the basic theory of energetic ion penetration of solids. The technique of ion implantation has become a very useful and stable technique in the field of semiconductor device fabrication.

This use of ion implantation is being adopted by industry. Another important application is the fundamental study of. Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. The book is divided into two parts.

Part 1 discusses topics such as the history of the ion implantation; the different types and purposes of ion implanters; the penetration of energetic Book Edition: 1. Get this book in print. ; Barnes&; Ion Implantation Damage in Silicon. Damage Annealing in Silicon and Electrical Activity.

sections not shown. Other editions - View all. Ion Implantation Science and Technology J.F. Ziegler Limited preview - Ion Implantation Science and Technology J.F. Ziegler. Ion implantation is a major application of plasma processing in a variety of applications in which the surfaces of materials are to be treated.

The implantation process requires a source of ions and a means to accelerate them toward the surface. Two .